Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398461 | Substrate cleaning apparatus and substrate cleaning method | Tsunenaga Nakashima | 2025-08-26 |
| 12276027 | Substrate processing apparatus and substrate processing method | Katsuhiro Morikawa, Mitsuaki Iwashita, Satoshi Kaneko | 2025-04-15 |