Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417928 | Substrate processing method and substrate processing system | Takeo Nakano, Mitsuaki Iwashita, Ryuichi Asako, Naoki UMESHITA | 2025-09-16 |
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Yoji IIZUKA, Mitsuaki Iwashita, Antonio Luis Pacheco Rotondaro, Dipak Aryal, Takeo Nakano +5 more | 2025-09-02 |
| 12247768 | Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method | Koji Akiyama, Hiroyuki Nagai, Mitsuaki Iwashita | 2025-03-11 |