Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Hirokazu Ueda, Yoji IIZUKA, Mitsuaki Iwashita, Antonio Luis Pacheco Rotondaro, Dipak Aryal +5 more | 2025-09-02 |
| 12349434 | Manufacturing method for semiconductor device | Chihiro TAMURA, Philippe Gaubert | 2025-07-01 |
| 12247768 | Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method | Hiroyuki Nagai, Mitsuaki Iwashita, Hirokazu Ueda | 2025-03-11 |