Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387914 | Upper electrode assembly | Takaki Kobune, Hiroshi Tsujimoto | 2025-08-12 |
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Nobutaka SASAKI, Toshiki AKAMA, Shusei KATO, Gyeong min PARK +2 more | 2025-05-20 |
| 12217942 | Plasma processing apparatus | Hironobu Kudo, Hiroshi Tsujimoto | 2025-02-04 |