Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387914 | Upper electrode assembly | Lifu LI, Hiroshi Tsujimoto | 2025-08-12 |
| 12315702 | Plasma processing apparatus | — | 2025-05-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387914 | Upper electrode assembly | Lifu LI, Hiroshi Tsujimoto | 2025-08-12 |
| 12315702 | Plasma processing apparatus | — | 2025-05-27 |