Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387914 | Upper electrode assembly | Lifu LI, Takaki Kobune | 2025-08-12 |
| 12354841 | Substrate processing device, substrate processing system, control method for substrate processing device, and control method for substrate processing system | Ikko Tanaka | 2025-07-08 |
| 12217942 | Plasma processing apparatus | Lifu LI, Hironobu Kudo | 2025-02-04 |