Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354849 | Plasma processing apparatus | Gyeong min PARK | 2025-07-08 |
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Lifu LI, Toshiki AKAMA, Shusei KATO, Gyeong min PARK +2 more | 2025-05-20 |
| 12261028 | Plasma processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Takaaki Kikuchi, Atsushi Ogata, Takashi Taira | 2025-03-25 |
| 12191119 | Substrate processing apparatus and gas switching method for substrate processing apparatus | — | 2025-01-07 |