Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424424 | Plasma monitoring system, plasma monitoring method, and monitoring device | Satoru TERUUCHI, Jun Hirose, Shinji Himori | 2025-09-23 |
| 12322578 | Exhaust device, processing apparatus, and exhausting method | Kazuki Moyama, Toshiya Matsuda, Naokazu Furuya, Tatsuro Ohshita | 2025-06-03 |
| 12288676 | Stage and substrate processing apparatus | Takayuki Ishii, Michishige Saito | 2025-04-29 |
| 12255049 | Plasma processing apparatus and plasma processing method | Koichi Nagami, Shinji Himori | 2025-03-18 |
| 12186898 | Part transporting device and processing system | Kazuki Moyama, Toshiya Matsuda | 2025-01-07 |