SH

Shinji Himori

TL Tokyo Electron Limited: 2 patents #126 of 785Top 20%
📍 Rifu, JP: #44 of 257 inventorsTop 20%
Overall (2025): #87,272 of 469,880Top 20%
2
Patents 2025

Issued Patents 2025

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
12424424 Plasma monitoring system, plasma monitoring method, and monitoring device Satoru TERUUCHI, Jun Hirose, Kazuya Nagaseki 2025-09-23
12255049 Plasma processing apparatus and plasma processing method Koichi Nagami, Kazuya Nagaseki 2025-03-18