Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424423 | Substrate processing apparatus | Atsushi Sawachi, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2025-09-23 |
| 12424424 | Plasma monitoring system, plasma monitoring method, and monitoring device | Satoru TERUUCHI, Kazuya Nagaseki, Shinji Himori | 2025-09-23 |
| 12347660 | Substrate processing apparatus, substrate processing system, and maintenance method | Atsushi Sawachi, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2025-07-01 |
| 12293937 | Plasma processing apparatus and mounting table thereof | Yohei Uchida | 2025-05-06 |