Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322599 | Substrate processing method, modification device and substrate processing system | Norifumi Kohama | 2025-06-03 |
| 12288676 | Stage and substrate processing apparatus | Kazuya Nagaseki, Michishige Saito | 2025-04-29 |