Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359308 | Film forming method and semiconductor production apparatus | Yusuke Suzuki, Tsuyoshi Moriya, Atsushi Endo, Satoshi Tanaka | 2025-07-15 |
| 12288671 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2025-04-29 |