Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288671 | Film deposition apparatus for fine pattern forming | Kazuhide Hasebe, Jun Ogawa, Hiroki Murakami | 2025-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288671 | Film deposition apparatus for fine pattern forming | Kazuhide Hasebe, Jun Ogawa, Hiroki Murakami | 2025-04-29 |