Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411472 | Numerical control device | — | 2025-09-09 |
| 12400870 | Substrate processing method and substrate processing apparatus | Shuichiro SAKAI | 2025-08-26 |
| 12288671 | Film deposition apparatus for fine pattern forming | Kazuhide Hasebe, Shigeru Nakajima, Jun Ogawa | 2025-04-29 |