Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359308 | Film forming method and semiconductor production apparatus | Yusuke Suzuki, Tsuyoshi Moriya, Kazuhide Hasebe, Satoshi Tanaka | 2025-07-15 |
| 12289860 | Liquid cooling module | Yuki Kanai, Kenji Sasabe, Keita Hirai, Hideo Kubo, Masahide Kodama +1 more | 2025-04-29 |
| 12191140 | Method for manufacturing semiconductor device and substrate processing apparatus | Yutaka Motoyama | 2025-01-07 |