Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293492 | Substrate processing apparatus and monitoring method in substrate processing apparatus | Shinji Shimizu, Ryo Yamada, Tatsuya MASUI, Miwa MIYAWAKI | 2025-05-06 |
| 12278083 | Substrate holder state detection device and substrate holder state detection method | Yuji Okita, Hideji NAOHARA, Hiroaki KAKUMA, Tatsuya MASUI | 2025-04-15 |