Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12423801 | Substrate treating apparatus, substrate treating system, and substrate treating method | — | 2025-09-23 |
| 12293492 | Substrate processing apparatus and monitoring method in substrate processing apparatus | Ryo Yamada, Tatsuya MASUI, Yuichi DEBA, Miwa MIYAWAKI | 2025-05-06 |