Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322600 | Substrate treatment apparatus, substrate treatment method, substrate treatment system, and learning data generation method | Takashi Ota, Takashi Ikeuchi, Yasunori Nakamura | 2025-06-03 |
| 12278083 | Substrate holder state detection device and substrate holder state detection method | Yuji Okita, Hiroaki KAKUMA, Tatsuya MASUI, Yuichi DEBA | 2025-04-15 |
| 12271448 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Tomonori Fujiwara, Yumiko Hirato, Atsushi Sonoda | 2025-04-08 |
| 12211197 | Substrate processing apparatus and substrate processing method | Hiroaki KAKUMA | 2025-01-28 |