Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278083 | Substrate holder state detection device and substrate holder state detection method | Yuji Okita, Hideji NAOHARA, Tatsuya MASUI, Yuichi DEBA | 2025-04-15 |
| 12211197 | Substrate processing apparatus and substrate processing method | Hideji NAOHARA | 2025-01-28 |