Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Hideyuki OSADA, Genichi Nanasaki, Seiichi Kaise, Masatomo KITA +1 more | 2025-04-29 |
| 12192610 | Imaging device with illumination unit featuring light shielding component | Takao Ushiyama | 2025-01-07 |