Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341046 | Transfer apparatus and transfer method | Norihiko Amikura | 2025-06-24 |
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Hideyuki OSADA, Genichi Nanasaki, Seiichi Kaise, Takashi Takizawa +1 more | 2025-04-29 |
| 12198952 | Substrate processing apparatus | Masahiro DOGOME | 2025-01-14 |
| 12191188 | Transfer device, transfer system, and end effector | Norihiko Amikura, Masahiro DOGOME, Takami FUKASAWA, Daisuke Hayashi, Toshiaki TOYOMAKI | 2025-01-07 |