Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Hideyuki OSADA, Genichi Nanasaki, Masatomo KITA, Takashi Takizawa +1 more | 2025-04-29 |