Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341046 | Transfer apparatus and transfer method | Masatomo KITA | 2025-06-24 |
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Hideyuki OSADA, Genichi Nanasaki, Seiichi Kaise, Masatomo KITA, Takashi Takizawa +1 more | 2025-04-29 |
| 12264947 | Measuring system, measuring device, and measuring method | Takayuki Hatanaka, Kimihiro YOKOYAMA | 2025-04-01 |
| 12191188 | Transfer device, transfer system, and end effector | Masatomo KITA, Masahiro DOGOME, Takami FUKASAWA, Daisuke Hayashi, Toshiaki TOYOMAKI | 2025-01-07 |