Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1094319 | Upper chamber for a plasma processing device | Koji Nagai, Tadayoshi Kawaguchi, Kohei Sato | 2025-09-23 |
| 12266508 | Plasma processing apparatus and method for venting a processing chamber to atmosphere | Masaru Matsuzaki | 2025-04-01 |
| 12191121 | Plasma processing apparatus | Masaki Ishiguro, Masahiro Sumiya, Shigeru Shirayone | 2025-01-07 |