Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387921 | Apparatus diagnostic apparatus, apparatus diagnostic method, plasma processing apparatus and semiconductor device manufacturing system | Shota Umeda, Yoshito Kamaji, Kenji Tamaki | 2025-08-12 |
| 12368031 | Plasma processing method | Kosa Hirota, Koichi Nakaune, Nanako Tamari, Satomi Inoue, Shigeru Nakamoto | 2025-07-22 |
| 12191121 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Shigeru Shirayone | 2025-01-07 |