Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1094319 | Upper chamber for a plasma processing device | Koji Nagai, Tadayoshi Kawaguchi, Kazuyuki Ikenaga | 2025-09-23 |
| 12390746 | Simulated moving-bed type chromatographic separation method and simulated moving-bed type chromatographic separation system | Masahiro Ogino, Kazuo Okada, Masaki TSURUTA, Toshiki Miyajima | 2025-08-19 |
| 12334316 | Plasma processing apparatus and plasma processing method | Takamasa Ichino | 2025-06-17 |
| 12322609 | Substrate processing apparatus and substrate processing method | Hiroki Takahashi | 2025-06-03 |
| 12220732 | Substrate cleaning system and substrate cleaning method | Hiroki Takahashi, Koichi Fukaya | 2025-02-11 |