Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370578 | Substrate cleaning apparatus and substrate cleaning method | Fumitoshi Oikawa, Mitsuru Miyazaki | 2025-07-29 |
| 12220732 | Substrate cleaning system and substrate cleaning method | Hiroki Takahashi, Kohei Sato | 2025-02-11 |
| 12205831 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Fumitoshi Oikawa, Takuya Inoue | 2025-01-21 |