Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370578 | Substrate cleaning apparatus and substrate cleaning method | Koichi Fukaya, Mitsuru Miyazaki | 2025-07-29 |
| 12205831 | Cleaning apparatus and polishing apparatus | Mitsuru Miyazaki, Tomoaki Fujimoto, Koichi Fukaya, Takuya Inoue | 2025-01-21 |