Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370578 | Substrate cleaning apparatus and substrate cleaning method | Fumitoshi Oikawa, Koichi Fukaya | 2025-07-29 |
| 12350787 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2025-07-08 |
| 12205831 | Cleaning apparatus and polishing apparatus | Tomoaki Fujimoto, Koichi Fukaya, Fumitoshi Oikawa, Takuya Inoue | 2025-01-21 |