Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266508 | Plasma processing apparatus and method for venting a processing chamber to atmosphere | Kazuyuki Ikenaga | 2025-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266508 | Plasma processing apparatus and method for venting a processing chamber to atmosphere | Kazuyuki Ikenaga | 2025-04-01 |