Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424410 | RF pulsing within pulsing for semiconductor RF plasma processing | Maolin Long, Ying Wu, Alex Paterson | 2025-09-23 |
| 12397435 | Substrate location detection and adjustment | Michael J. Martin, Alexander Paterson | 2025-08-26 |
| 12261029 | Protection system for switches in direct drive circuits of substrate processing systems | Maolin Long, Michael J. Martin, Alexander Paterson | 2025-03-25 |
| 12193138 | Matchless plasma source for semiconductor wafer fabrication | Maolin Long, Ricky Marsh, Alex Paterson | 2025-01-07 |