Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394595 | Multi-antenna unit for large area inductively coupled plasma processing apparatus | ShouQian Shao, Chien-Teh Kao, Jianhua Zhou | 2025-08-19 |
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2025-07-15 |
| 12237406 | Plasma treatment on metal-oxide TFT | Soo Young Choi, Beom Soo Park, Yi Cui, Dong-Kil Yim | 2025-02-25 |