Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283462 | Control of plasma formation by RF coupling structures | Hema Swaroop Mopidevi, Lee Chen, Thomas W. Anderson, Neil Benjamin | 2025-04-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283462 | Control of plasma formation by RF coupling structures | Hema Swaroop Mopidevi, Lee Chen, Thomas W. Anderson, Neil Benjamin | 2025-04-22 |