| 12387909 |
Low frequency RF generator and associated electrostatic chuck |
Alexei Marakhtanov, Felix Kozakevich, Bing Ji, John Holland, Alexander Matyushkin |
2025-08-12 |
| 12362159 |
Systems and methods for controlling a plasma sheath characteristic |
Alexei Marakhtanov, James Eugene Caron, John Holland, Felix Kozakevich, Bing Ji |
2025-07-15 |
| 12354840 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
John Holland, Felix Kozakevich, Bing Ji, Alexei Marakhtanov |
2025-07-08 |
| 12308211 |
Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate |
Alexei Marakhtanov, Felix Kozakevich, John Holland |
2025-05-20 |
| 12266505 |
Systems and methods for using binning to increase power during a low frequency cycle |
Alexei Marakhtanov, Felix Kozakevich, Bing Ji, John Holland |
2025-04-01 |
| 12255052 |
Process control for ion energy delivery using multiple generators and phase control |
Felix Kozakevich, Alexei Marakhtanov, John Holland, Eric A. Hudson |
2025-03-18 |
