Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322601 | Alternating hardmasks for tight-pitch line formation | Sean D. Burns, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2025-06-03 |
| 12310100 | Dielectric reflow for boundary control | Jing Guo, Ekmini Anuja De Silva, Nicolas Loubet, Indira Seshadri, Ruqiang Bao | 2025-05-20 |
| 12261044 | Multi-layer hardmask for defect reduction in EUV patterning | Bhaskar Nagabhirava, Phillip Friddle, Ekimini Anuja De Silva, Jennifer Church, Dominik Metzler | 2025-03-25 |