Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283462 | Control of plasma formation by RF coupling structures | Hema Swaroop Mopidevi, Thomas W. Anderson, Shaun Smith, Neil Benjamin | 2025-04-22 |
| 12198896 | Compact high density plasma source | Roger Patrick, Neil Benjamin, Alan M. Schoepp, Clint Thomas, Thomas W. Anderson +1 more | 2025-01-14 |