Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Aixi ZHANG +10 more | 2025-08-19 |
| 12374568 | One chamber multi-station selective metal removal | Shiyu YUE, Sahil Patel, Yu Lei, Wei Lei, Chih-Hsun Hsu +7 more | 2025-07-29 |