Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404584 | Parallel atomic layer deposition of target element interiors | Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Gayatri Natu, Mahesh Arcot +4 more | 2025-09-02 |
| 12322633 | Electrostatic chuck with improved temperature control | Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi, Shekhar ATHANI +2 more | 2025-06-03 |