Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326669 | Illumination apparatus and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman, Arie Jeffrey Den Boef, Sebastianus Adrianus GOORDEN, Nitish Kumar +1 more | 2025-06-10 |
| 12265229 | Method and apparatus for coherence scrambling in metrology applications | Janneke Ravensbergen | 2025-04-01 |
| 12209994 | Method and metrology tool for determining information about a target structure, and cantilever probe | Mustafa Ümit ARABUL, Coen Adrianus Verschuren | 2025-01-28 |