Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405539 | Substrate support and substrate table | Coen Hubertus Matheus Baltis, Nicolaas Ten Kate, Marcus Martinus Petrus Adrianus Vermeulen, Siegfried Alexander Tromp, Frank Pieter Albert Van Den Berkmortel +3 more | 2025-09-02 |
| 12386273 | Substrate holder, lithographic apparatus and method | Andre Schreuder, Ludolf POSTMA | 2025-08-12 |
| 12249535 | Substrate holder for use in a lithographic apparatus | Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Roger Anton Marie Timmermans +1 more | 2025-03-11 |
| 12197141 | Suction clamp, object handler, stage apparatus and lithographic apparatus | — | 2025-01-14 |