Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278110 | Bias voltage modulation approach for SiO/SiN layer alternating etch process | Sean S. Kang, Kenji Takeshita, Sanghyuk CHOI, Mengnan ZOU, Zihao Ding | 2025-04-15 |
| 12237148 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy +4 more | 2025-02-25 |