Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi +2 more | 2025-06-03 |