Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154753 | Device to control uniformity of extracted ion beam | Jay T. Scheuer, Graham Wright, Alexandre Likhanskii | 2024-11-26 |
| 12106936 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Morgan Evans, Joseph C. Olson, Christopher A. Rowland, James P. Buonodono | 2024-10-01 |
| 11996266 | Apparatus and techniques for substrate processing using independent ion source and radical source | Anthony Renau, Joseph C. Olson | 2024-05-28 |
| 11967489 | Apparatus and techniques for angled etching using multielectrode extraction source | Morgan Evans, Joseph C. Olson | 2024-04-23 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Costel Biloiu, Jay Wallace, Kevin M. Daniels, Kevin T. Ryan +3 more | 2024-04-02 |
| 11862433 | System and methods using an inline surface engineering source | Christopher R. Hatem, Christopher A. Rowland, Joseph C. Olson, Anthony Renau | 2024-01-02 |