Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106936 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Peter F. Kurunczi, Morgan Evans, Joseph C. Olson, Christopher A. Rowland | 2024-10-01 |