Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106936 | Scanned angled etching apparatus and techniques providing separate co-linear radicals and ions | Peter F. Kurunczi, Morgan Evans, Christopher A. Rowland, James P. Buonodono | 2024-10-01 |
| 12106935 | Modulation of rolling k vectors of angled gratings | Morgan Evans, Rutger Meyer Timmerman Thijssen | 2024-10-01 |
| 12106925 | Cyclotron having continuously variable energy output | Frank Sinclair, Klaus Becker, Tseh-Jen Hsieh, Morgan Patrick Dehnel, Anand Mathai George | 2024-10-01 |
| 12099241 | Forming variable depth structures with laser ablation | Peter Kurunczi, Morgan Evans, Rutger Meyer Timmerman Thijssen | 2024-09-24 |
| 12002649 | Spinning disk with electrostatic clamped platens for ion implantation | Robert J. Mitchell, Frank Sinclair, William T. Weaver, Nick Parisi | 2024-06-04 |
| 11996266 | Apparatus and techniques for substrate processing using independent ion source and radical source | Anthony Renau, Peter F. Kurunczi | 2024-05-28 |
| 11967489 | Apparatus and techniques for angled etching using multielectrode extraction source | Peter F. Kurunczi, Morgan Evans | 2024-04-23 |
| 11948781 | Apparatus and system including high angle extraction optics | Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Jay Wallace, Kevin M. Daniels +3 more | 2024-04-02 |
| 11862433 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Anthony Renau | 2024-01-02 |