Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996266 | Apparatus and techniques for substrate processing using independent ion source and radical source | Joseph C. Olson, Peter F. Kurunczi | 2024-05-28 |
| 11862433 | System and methods using an inline surface engineering source | Christopher R. Hatem, Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson | 2024-01-02 |