Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174549 | Liquid amount measuring method and computer-readable recording medium | Shota Ueyama, Akihiro Teramoto, Yuta Nishiyama, Shinichi Hatakeyama | 2024-12-24 |
| 12057327 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Yuichi Douki, Satoshi Biwa, Satoshi Okamura, Katsuhiro Ookawa | 2024-08-06 |
| 11914298 | Liquid processing apparatus and method of detecting liquid in liquid processing apparatus | Takafumi Hayama, Hidehiro Suzuki | 2024-02-27 |