Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057327 | Substrate processing apparatus and substrate processing method | Yuichi Douki, Satoshi Biwa, Satoshi Okamura, Katsuhiro Ookawa, Yuichiro KUNUGIMOTO | 2024-08-06 |
| 11901197 | Substrate processing apparatus and substrate processing method | Reijiro Yamanaka | 2024-02-13 |