KO

Katsuhiro Ookawa

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #391,552 of 561,600Top 70%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12057327 Substrate processing apparatus and substrate processing method Masataka Gosho, Yuichi Douki, Satoshi Biwa, Satoshi Okamura, Yuichiro KUNUGIMOTO 2024-08-06