Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057327 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Yuichi Douki, Satoshi Biwa, Katsuhiro Ookawa, Yuichiro KUNUGIMOTO | 2024-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057327 | Substrate processing apparatus and substrate processing method | Masataka Gosho, Yuichi Douki, Satoshi Biwa, Katsuhiro Ookawa, Yuichiro KUNUGIMOTO | 2024-08-06 |